• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    PURPOSE: A flow rate measurement apparatus is provided to check a status of exhaust gas exhausted through a gas pipe with a naked eye without using an additional measurement device. CONSTITUTION: A flow rate measurement apparatus includes a gas pipe(110), a gauge(130) installed in the gas pipe(110), and a transparent window(120) forming one portion of the gas pipe(110). The gas pipe(110) is used for discharging exhaust gas to an exterior and has a conical shape. The gauge(130) has a semi-circular shape. The gauge(130) is exposed to exhaust gas for a long time so that the gauge(130) is made from a material having an erosion resistance property. The gauge(130) is connected to an inner portion of the gas pipe(110) by means of a hinge(140).
    公开号:KR20040066649A
    申请号:KR1020030003777
    申请日:2003-01-20
    公开日:2004-07-27
    发明作者:전태승；고영민；이병범
    申请人:삼성전자주식회사；
    IPC主号:
    专利说明:

    Flow measuring device {Apparatus for measuring Flow}
    [9] The present invention is a flow rate measuring device for checking the flow rate of the fluid, more specifically, a device that can directly check the discharge state, such as the capacity, flow rate and pressure of the fluid through the pipe without a separate measuring device.
    [10] In recent years, with the rapid development of the information communication field and the widespread use of information media such as computers, semiconductor devices are also rapidly developing. In terms of its function, the semiconductor device is required to operate at a high speed and to have a large storage capacity. Accordingly, the manufacturing technology of the semiconductor device has been developed to improve the degree of integration, reliability, and response speed.
    [11] The semiconductor device is generally manufactured by sequentially performing a series of unit processes for film formation, pattern formation, metal wiring formation, and the like. Such processes include CVD, diffusion, ion implantation and etching processes. Generally, in order to proceed with the processes, various kinds of process gases suitable for the purpose of the process are supplied. After the process is completed, the residue of the gas used in the process, that is, the exhaust gas is discharged to the outside.
    [12] In this case, when the exhaust gas is not discharged normally, the exhaust gas remains and affects the subsequent process or changes the atmosphere of the process chamber in which the process is performed, thereby adversely affecting the quality of the semiconductor wafer. Therefore, it is important to confirm the discharge state of the exhaust gas.
    [13] However, there is a problem in that the main pipe installed in the semiconductor line and the pipe installed in the facility cannot see the inside thereof, and thus characteristics such as capacity, flow rate, and pressure of the exhaust gas cannot be confirmed.
    [14] An object of the present invention for solving the above problems is to provide a flow rate measuring device that can check the state of the exhaust gas discharged through the pipe directly to the naked eye without using a separate measuring device.
    [1] 1 is a schematic view for explaining a flow rate measuring apparatus according to an embodiment of the present invention.
    [2] 2 is a cross-sectional view of the flow rate measuring device shown in FIG.
    [3] 3 is a cross-sectional view for explaining a flow rate measuring device according to another preferred embodiment of the present invention.
    [4] Explanation of symbols on the main parts of the drawings
    [5] 110, 210: pipe 120, 220: transparent window
    [6] 122: graduation 124: normal range
    [7] 130, 230: gauge 132, 232: side
    [8] 140, 240: hinge 150: control unit
    [15] In order to achieve the object of the present invention, the present invention is a pipe for providing a flow path of the fluid, the hinge and (hinge) coupled to the inner surface of the pipe, the gauge and the pipe is changed in slope according to the flow rate of the fluid Comprising a portion of, and provides a flow rate measuring device comprising a transparent window for visually checking the discharge state of the fluid and the degree of inclination of the gauge.
    [16] In addition, the degree of inclination of the gauge is displayed on the transparent window, and a scale indicating a normal range for checking the degree of inclination of the gauge when the fluid is normally discharged is formed.
    [17] The flow rate measuring device according to the present invention configured as described above may check whether the fluid is normally discharged by checking whether the gauge points to a normal range through the transparent window. In addition, since the discharge state of the fluid can be immediately and often checked through the transparent window, problems occurring when the fluid is discharged can be confirmed early.
    [18] Hereinafter, a flow rate measuring apparatus according to a preferred embodiment of the present invention with reference to the accompanying drawings will be described in detail.
    [19] 1 is a schematic view for explaining a flow rate measuring apparatus according to an embodiment of the present invention.
    [20] 2 is a cross-sectional view of the flow rate measuring device shown in FIG.
    [21] 1 and 2, the flow rate measuring device includes a pipe 110, a gauge 130 disposed inside the pipe 110, and a transparent window 120 constituting one side of the pipe 110. It is an apparatus for measuring the flow volume of the exhaust gas which arises in a semiconductor device manufacturing process.
    [22] Pipe 110 is for discharging the exhaust gas to the outside has a circular shape. The material of the pipe 110 depends on the type of the exhaust gas discharged. In general, it is formed of a material such as plastic or stainless steel that does not oxidize well.
    [23] Gauge 130 is semi-circular in the form of a thin plate. Gauge 130 is preferably such that the size is less than half the diameter of the pipe (110). This is for the maximum suppression that the flow of the exhaust gas is disturbed by the gauge 130 while the exhaust gas is discharged. The gauge 130 is exposed to the exhaust gas for a long time whenever the exhaust gas is discharged. Therefore, the gauge 130 is preferably formed of a material that does not corrode or react by the exhaust gas.
    [24] Gauge 130 is connected to the hinge 140 to the upper portion of the inner surface of the pipe (110). The number 140a of the hinge 140 is connected to the center portion of the arc portion of the gauge 130, and the arm 140b of the hinge 140 is connected to the pipe 110. As the hinge 140 of the female 140b and the female 140a is connected, the gauge 130 is suspended from the pipe 110. In this case, the gauge 130 is disposed to be perpendicular to the traveling direction of the exhaust gas discharged through the pipe 110. This position is the initial position 130a of the gauge 130.
    [25] In the state where the exhaust gas is not discharged through the pipe 110, the gauge 130 is vertical. When the exhaust gas starts to be discharged through the pipe 110, the gauge 130 is pushed in the traveling direction of the exhaust gas by the exhaust gas. The degree to which the gauge 130 is pushed depends on the characteristics of the exhaust gas, that is, capacity, pressure, and flow rate. For example, when the flow rate of the exhaust gas is large, the pressure received by the gauge 130 also increases, so that the gauge 130 is greatly inclined based on the vertical. When the flow rate of the exhaust gas is small, the pressure received by the gauge 130 becomes small, so that the gauge 130 is tilted small with respect to the vertical.
    [26] The transparent window 120 is for checking the exhaust gas discharge state inside the pipe 110. The transparent window 120 is preferably made of a material such as tempered glass or transparent plastic so that the inside of the pipe 110 can be seen.
    [27] The tempered glass is a glass in which a molded plate glass is heated to 500 to 600 ° C. close to the softening temperature, quenched by compressed cooling air to compressively deform the glass surface portion, and tensilely deform the inside. Compared with ordinary glass, the bending strength is 3 to 5 times stronger, the impact resistance is 3 to 8 times stronger, and the heat resistance is also excellent. However, because the glass itself has a balance of power inside, even if one side is cut a little, the whole is broken into adzuki bean-sized debris.
    [28] Transparent plastics are made of soft vinyl chloride (PVC). The soft vinyl chloride has excellent flexibility and processability, good chemical resistance and durability, as well as excellent transparency.
    [29] The transparent window 120 is cut in half in the direction of the central axis of the pipe 110. Therefore, the height of the transparent window 120 is the same as the diameter of the pipe (110). The length of the transparent window 120 depends on the diameter of the pipe 110, but is approximately 200mm to 250mm. The transparent window 120 having the same size constitutes one side of the pipe 110. Therefore, the inside of the pipe 110 can be directly confirmed through the transparent window 120.
    [30] The scale 122 is displayed on the outer surface of the transparent window 120. The side portion 132 of the gauge 130 in the form of a thin plate serves as a needle pointing to the scale 122. The gauge 130 rotates about the hinge 140 by the exhaust gas. Accordingly, the scale 122 preferably has a curved shape so that the scale 122 can be well indicated by the side portion 132 of the gauge 130 serving as the needle.
    [31] In addition, the scale 122 of the transparent window 120 has a portion 124 is displayed a certain range. When the exhaust gas is normally exhausted, the gauge 130 is inclined at a predetermined angle with the vertical initial position 130a, and at this time, the position of the side portion 132 has a predetermined range. This constant range is called the normal range 124. Therefore, when the side portion 132 of the gauge 130 points to the normal range 124 when the exhaust gas is discharged, the exhaust gas is normally discharged. If the side portion 132 is pointing to the scale of the portion other than the normal range 124, the discharge state of the exhaust gas is not normal. Therefore, there is a problem in the discharge of the exhaust gas has to find and solve the problem.
    [32] The normal range 124 is changed in position depending on the type of the pipe 110 or the flow rate of the exhaust gas. Therefore, when the exhaust gas is normally exhausted, it is important to accurately mark the side portion 132 range of the gauge 130.
    [33] On the other hand, unlike the above, after displaying the normal range 124 first, the thickness of the gauge 124 so as to point to the normal range 124 in which the side portion 132 of the gauge 130 is displayed according to the exhaust amount of the exhaust gas. That is, the mass can also be determined.
    [34] The controller 150 is provided in front of the portion in which the gauge 130 and the transparent window 120 are installed in the pipe 110. That is, the exhaust gas passes through the control unit 150 and then the gauge 130. The controller 150 controls the flow rate of the exhaust gas flowing through the pipe 110. The pipe 110 may have a required discharge flow rate depending on the installation position or the type of exhaust gas discharged. In this case, the controller 150 may control the discharge flow rate. It is preferable that the control part 150 is comprised by valves, such as a gate valve and a globe valve.
    [35] 3 is a cross-sectional view for explaining a flow rate measuring device according to another preferred embodiment of the present invention.
    [36] Referring to FIG. 3, another embodiment according to the present invention has the same effects and functions as the preferred embodiment of the present invention shown in FIGS. 1 and 2. Only the shape of the pipe 210 is different, and accordingly there is a difference in the shape of the transparent window 220, the gauge 230 and the number of hinges 240.
    [37] The pipe 210 has a rectangular cross section. The transparent window 220 is provided to form one side of the pipe 210. The height of the transparent window 220 is the same as the height of the pipe 210, the length is about 200mm to 250mm. The transparent window 220 is displayed a scale in which the appropriate range is displayed.
    [38] Gauge 230 is rectangular in the form of a thin plate. Gauge 230 is preferably such that the height is less than half the height of the pipe (210). The width of the gauge 230 is preferably to be slightly narrower than the width of the pipe (210).
    [39] Gauge 230 is connected to the two hinges 240 on the upper portion of the inner surface of the pipe (210). The pairs 240a of the hinges 240 are respectively connected to both ends of the side surfaces of the gauge 230, and the arms 240b of the hinges 240 are respectively connected to the pipe 210. As the hinge 240 of the female 240b and the male 240a is connected, the gauge 230 is suspended from the pipe 210. At this time, the gauge 230 is disposed to be perpendicular to the traveling direction of the exhaust gas discharged through the pipe 210.
    [40] Hereinafter, with reference to the drawings will be briefly described the working relationship of the flow rate measuring apparatus according to a preferred embodiment of the present invention.
    [41] First, the exhaust gas whose flow rate is controlled by the controller 150 flows into the pipe 110. The exhaust gas pushes the gauge 130 at its initial position 130a in the vertical state. Thus, the gauge 130 is tilted. At this time, when the exhaust gas is normally discharged, the side portion 132 of the gauge 130 points to the normal range 124 indicated on the scale 122. Through the transparent window 120 can check whether the side portion 132 points to the normal range 124, it can also check the state of the interior of the pipe (210).
    [42] According to the present invention as described above, it is possible to immediately and often check the state of the discharge of the fluid and the state inside the pipe through the flow rate measuring device. Therefore, it is possible to reduce the incidence rate of the problem by early checking for any abnormality of the pipe.
    [43] While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.
    权利要求:
    Claims (4)
    [1" claim-type="Currently amended] Piping for providing a flow path of the fluid;
    A gauge coupled to an inner side of the pipe, the gauge being inclined according to the flow rate of the fluid; And
    Part of the pipe, the flow rate measuring device comprising a transparent window for visually checking the discharge state of the fluid and the degree of inclination of the gauge.
    [2" claim-type="Currently amended] The flow rate measuring apparatus according to claim 1, wherein a scale for checking a flow rate of the fluid is formed in the transparent window.
    [3" claim-type="Currently amended] The flow rate measuring apparatus of claim 1, wherein the transparent window is made of tempered glass or transparent plastic.
    [4" claim-type="Currently amended] The flow rate measuring apparatus of claim 1, wherein the gauge is disposed to be perpendicular to the direction of travel of the fluid.
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    同族专利:
    公开号 | 公开日
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2003-01-20|Application filed by 삼성전자주식회사
    2003-01-20|Priority to KR1020030003777A
    2004-07-27|Publication of KR20040066649A
    优先权:
    申请号 | 申请日 | 专利标题
    KR1020030003777A|KR20040066649A|2003-01-20|2003-01-20|Apparatus for measuring Flow|
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